N type, Si doped GaN template
N type, undoped GaN template
Semi-insulating, Fe doped GaN template
P type, Mg doped GaN template
AlN template
InGaN templates
Free Standing GaN template
They exhibit industry leading low defect densities and are epi ready for subsequent device epitaxy
For detail specs, please see below:
1)N type, Si doped GaN template(GaN on Sapphire(0001))
Conduction Type: Si doped (N+)
Thickness:4um,20um,30um,50um,100um
Orientation: c-axis (0001) ± 1.0°
Resistivity: <0.05 Ohm.cm
Dislocation Density:<1x108cm-2
Substrate Structure: GaN on Sapphire(0001)
Front Surface Finish (Ga-face): As-grown
Back Surface Finish: SSP or DSP
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm), 3” (76.2 mm) and 4” (100 mm)
Available Grades: Production, Research and Rider
2)N type, undoped GaN template
Conduction Type: undoped (N-)
Thickness:4um,20um,30um,50um,100um
Orientation: c-axis (0001) ± 1.0°
Resistivity: <0.05 Ohm.cm
Dislocation Density:<1x108cm-2
Substrate Structure: GaN on Sapphire(0001)
Front Surface Finish (Ga-face): As-grown
Back Surface Finish: SSP or DSP
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm), 3” (76.2 mm) and 4” (100 mm)
Available Grades: Production, Research and Rider
3)Semi-insulating, Fe doped GaN template
Conduction Type: Fe doped (SI)
Thickness:30um,90um
Orientation: c-axis (0001) ± 1.0°
Resistivity: >1x106Ω·cm
Dislocation Density:<1x108cm-2
Substrate Structure: GaN on Sapphire(0001)
Front Surface Finish (Ga-face): As-grown
Back Surface Finish: SSP or DSP
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm), 3” (76.2 mm) and 4” (100 mm)
Available Grades: Production, Research and Rider
4)P type, Mg doped GaN template
Conduction Type: Mg doped (P+)
Thickness:5um
Orientation: C-axis(0001)+/-1O
Resistivity: <1Ω·cm or custom
Dopant Concentration:>1E17(cm-3) or custom
Substrate Structure: GaN on Sapphire(0001)
Front Surface Finish (Ga-face): As-grown
Back Surface Finish: SSP or DSP
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm)
Available Grades: Production, Research and Rider
5)2"GaN on 4H or 6H SiC substrate | ||||||||||
1)Undoped GaN buffer or AlN buffer are available; | ||||||||||
2)n-type(Si doped or undoped), p-type or semi-insulating GaN epitaxial layers available; | ||||||||||
3)vertical conductive structures on n-type SiC; | ||||||||||
4)AlGaN – 20-60nm thick, (20%-30%Al), Si doped buffer; | ||||||||||
5)GaN n-type layer on 330µm+/-25um thick 2” wafer. | ||||||||||
6) Single or double side polished, epi-ready, Ra<0.5um | ||||||||||
7)Typical
value on XRD:
|
6)2" GaN on Silicon Substrate |
1) GaN layer thickness:50nm-4um; |
2) N type or semi-insulating GaN are available; |
3) Single or double side polished, epi-ready, Ra<0.5um |
7)AlN template
Conduction Type: semi-insulating
Thickness:50-1000nm+/- 10%
Orientation: C-axis(0001)+/-1O
Orientation Flat:A-plane
XRD FWHM of (0002):<200 arcsec
Substrate Structure: AlN on sapphire
Back Surface Finish: SSP or DSP,epi-ready
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm),
Available Grades: Production, Research and Rider
8)InGaN templates
Conduction Type:In doped, semi-insulating
Thickness:50-200nm, custom
Orientation: C-axis(0001)+/-1O
Dislocation Density:~ 108 cm-2
Substrate Structure:
Surface Finish: SSP or DSP,epi-ready
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm)
Available Grades: Production, Research and Rider
9)Free Standing GaN template
Available Sizes: 2”dia,1.8"dia,1.5"dia, 1"dia,14mm*15mm square,10mm*10.5mm square,5mm*5.5mm square
Available Grades: LED grade, LD grade
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Source:PAM-XIAMEN
If you find them interesting,please contact us: gan@powerwaywafer.com or www.powerwaywafer.com.
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