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GaN/AlN on sapphire templates,(002) and (102) XRD rocking curve FWHM for
template is:
GaN on sapphire: 10um XRD
FWHM(002)< 150arcsec
FWHM(102)< 250arcsec
AlN on sapphire: XRD
FWHM(002)< 200arcsec
FWHM(10-12)<1000arcsec
If you want to view
more information about this, you can see below discuss:
Hi, What is your specification for (002) and (102) XRD
rocking curve FWHM for your GaN on sapphire and AlN on sapphire templates?
Reported by PAM-XIAMEN
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